Finite Element Analysis of SAW Sensor with ZnO Substrate for Dichloromethane (DCM) Gas Detection
نویسندگان
چکیده
A SAW gas sensor based on Zinc Oxide (ZnO) piezoelectric substrate is simulated and evaluated for the detection of dichloromethane (DCM) volatile organic compound (VOC). The study performed finite element method (FEM) using COMSOL Multiphysics software. obtained device response ZnO compared to one typical lithium niobate (LiNbO3) substrate. thin film polyisobutylene (PIB) membrane selected act as sensing layer. results reveal a linear behaviour resonance frequency downshift (i.e., sensitivity) versus investigated concentrations varying from 10 ppm 100 DCM gas. Additionally, by applying several thicknesses PIB ranging 0.3 μm 1.0 μm. observed shows less dependence thickness than LiNbO3 one.
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ژورنال
عنوان ژورنال: Archives of Acoustics
سال: 2023
ISSN: ['2300-262X', '0137-5075']
DOI: https://doi.org/10.24425/aoa.2021.138135